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Search for "electron beam evaporation" in Full Text gives 46 result(s) in Beilstein Journal of Nanotechnology.

Superconducting spin valve effect in Co/Pb/Co heterostructures with insulating interlayers

  • Andrey A. Kamashev,
  • Nadir N. Garif’yanov,
  • Aidar A. Validov,
  • Vladislav Kataev,
  • Alexander S. Osin,
  • Yakov V. Fominov and
  • Ilgiz A. Garifullin

Beilstein J. Nanotechnol. 2024, 15, 457–464, doi:10.3762/bjnano.15.41

Graphical Abstract
  • the magnetization of the Co1 layer. The layers were deposited using electron beam evaporation (Co, Pb) and AC sputtering (Si3N4). The deposition setup had a load-lock station with vacuum shutters, allowing one to transfer the sample holder without breaking the ultrahigh vacuum in the deposition
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Published 25 Apr 2024

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications

  • August K. Roos,
  • Ermes Scarano,
  • Elisabet K. Arvidsson,
  • Erik Holmgren and
  • David B. Haviland

Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23

Graphical Abstract
  • expose with a dose of 450 mJ/cm2 using an MLA150 from Heidelberg Instruments. We develop the pattern in maD533s for roughly 45 s and then deposit 10 nm chromium and 40 nm of gold by electron-beam evaporation in an Auto306 from Edwards Vacuum. Lift-off in mrREM700 removes the resist mask, and the
  • adhesion of the following 150 nm deposition of chromium with electron-beam evaporation in the Auto306 from Edwards. After the lift-off in mrREM700, we also strip the protective PMMA layer on the front side with AR600–71, and we clean the wafer in isopropanol (IPA). (d) Coarse circuit pattern. A layer of
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Published 15 Feb 2024

Measurements of dichroic bow-tie antenna arrays with integrated cold-electron bolometers using YBCO oscillators

  • Leonid S. Revin,
  • Dmitry A. Pimanov,
  • Alexander V. Chiginev,
  • Anton V. Blagodatkin,
  • Viktor O. Zbrozhek,
  • Andrey V. Samartsev,
  • Anastasia N. Orlova,
  • Dmitry V. Masterov,
  • Alexey E. Parafin,
  • Victoria Yu. Safonova,
  • Anna V. Gordeeva,
  • Andrey L. Pankratov,
  • Leonid S. Kuzmin,
  • Anatolie S. Sidorenko,
  • Silvia Masi and
  • Paolo de Bernardis

Beilstein J. Nanotechnol. 2024, 15, 26–36, doi:10.3762/bjnano.15.3

Graphical Abstract
  • for the 240 GHz channel is 34.8 GHz, and the maximum absorption occurs at a frequency of 239.6 GHz. Fabrication of samples of receiving systems with CEBs The samples and the sample blanks with electronic lithography, ready for electron beam evaporation, were fabricated at the Chalmers University of
  • /20 nm was deposited with an electron-beam evaporation machine. After lift-off, a double layer of MMA and ARP electron resist was deposited, which is necessary to form an aluminum oxide dielectric layer without breaking the vacuum. Then the electron lithography was made, but the resist was not
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Published 04 Jan 2024

N-Heterocyclic carbene-based gold etchants

  • Robert B. Chevalier,
  • Justin Pantano,
  • Matthew K. Kiesewetter and
  • Jason R. Dwyer

Beilstein J. Nanotechnol. 2023, 14, 865–871, doi:10.3762/bjnano.14.71

Graphical Abstract
  • Information File 1. Gold-coated glass slides were purchased from Electron Microscopy Sciences (71892-05, Hatfield, PA, USA). The films were 50 nm of gold deposited by electron beam evaporation onto a 2–7 nm chromium adhesion layer. Slides were cut into ca. 1 × 1 cm2 tokens and immersed in 2 mL of the relevant
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Published 21 Aug 2023

Formation of nanoflowers: Au and Ni silicide cores surrounded by SiOx branches

  • Feitao Li,
  • Siyao Wan,
  • Dong Wang and
  • Peter Schaaf

Beilstein J. Nanotechnol. 2023, 14, 133–140, doi:10.3762/bjnano.14.14

Graphical Abstract
  • small pieces were ready for thin film deposition. Metallic bilayers of Au and Ni of three different thickness ratios and a total thickness of 20 nm were deposited onto the SiO2/Si substrate by electron beam evaporation (CS400ES, VON ARDENNE) at a working pressure of 1 × 10−6 mbar. The Au layer was
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Published 20 Jan 2023

DNA aptamer selection and construction of an aptasensor based on graphene FETs for Zika virus NS1 protein detection

  • Nathalie B. F. Almeida,
  • Thiago A. S. L. Sousa,
  • Viviane C. F. Santos,
  • Camila M. S. Lacerda,
  • Thais G. Silva,
  • Rafaella F. Q. Grenfell,
  • Flavio Plentz and
  • Antero S. R. Andrade

Beilstein J. Nanotechnol. 2022, 13, 873–881, doi:10.3762/bjnano.13.78

Graphical Abstract
  • previously described by our group elsewhere [24]. The dimensions of the sensing region (100 μm × 100 μm) were defined by O2 plasma etching. The source and drain electrodes were fabricated by electron-beam evaporation of 2 nm/100 nm of Ti/Au, and we covered the metal contacts with a 10 μm thick passivation
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Published 02 Sep 2022

Zinc oxide nanostructures for fluorescence and Raman signal enhancement: a review

  • Ioana Marica,
  • Fran Nekvapil,
  • Maria Ștefan,
  • Cosmin Farcău and
  • Alexandra Falamaș

Beilstein J. Nanotechnol. 2022, 13, 472–490, doi:10.3762/bjnano.13.40

Graphical Abstract
  • allowed for the decoration of vertically aligned cone-shaped ZnO nanorods with Ag NPs on their sides and their top ends [35], and magnetron sputtering [7][36]. Electron beam evaporation of, for example, a 30 nm Au layer on ZnO nanopillars arrays [37] or of ZnO-elevated Au dimer nanostructures (Figure 2a,b
  • needed to develop efficient SERS substrates. The combination of several methods including nanosphere lithography, atomic layer deposition, electrodeposition, and electron-beam evaporation resulted in Au-covered hollow urchin-like ZnO structures (Figure 2e–k) [16]. The ZnO layer was deposited on a
  • substrate covered with polystyrene spheres by atomic layer deposition, followed by electrodeposition, which was used to grow ZnO nanowires onto the surface. The Au layer was deposited after burning off the polystyrene spheres by electron beam evaporation while monitoring its thickness. Considering the
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Published 27 May 2022

TiOx/Pt3Ti(111) surface-directed formation of electronically responsive supramolecular assemblies of tungsten oxide clusters

  • Marco Moors,
  • Yun An,
  • Agnieszka Kuc and
  • Kirill Yu. Monakhov

Beilstein J. Nanotechnol. 2021, 12, 203–212, doi:10.3762/bjnano.12.16

Graphical Abstract
  • points, identical oxide phases by electron beam evaporation of Ti on Pt(111) at increased oxygen partial pressures. However, the direct oxidation of the Pt3Ti alloy surface has the advantage of an easier reproducibility and an increased long-range order of the individual oxide phases [22]. For this study
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Published 16 Feb 2021

Walking energy harvesting and self-powered tracking system based on triboelectric nanogenerators

  • Mingliang Yao,
  • Guangzhong Xie,
  • Qichen Gong and
  • Yuanjie Su

Beilstein J. Nanotechnol. 2020, 11, 1590–1595, doi:10.3762/bjnano.11.141

Graphical Abstract
  • terephthalate) (PET) substrate. The Kapton film was fixed with a row of steel rods and heated, for 4 h in an oven at 100 °C, to achieve a wavy configuration. Copper foils were deposited onto both sides of the Kapton film by electron beam evaporation to form the wave-shaped electrode. The lead was connected to
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Published 20 Oct 2020

Proximity effect in [Nb(1.5 nm)/Fe(x)]10/Nb(50 nm) superconductor/ferromagnet heterostructures

  • Yury Khaydukov,
  • Sabine Pütter,
  • Laura Guasco,
  • Roman Morari,
  • Gideok Kim,
  • Thomas Keller,
  • Anatolie Sidorenko and
  • Bernhard Keimer

Beilstein J. Nanotechnol. 2020, 11, 1254–1263, doi:10.3762/bjnano.11.109

Graphical Abstract
  • thermal evaporation from an effusion cell while Nb and Pt were grown by electron beam evaporation. Reflection high-energy electron diffraction (RHEED) was measured in situ during deposition to trace the structure of the atomic layer being deposited. For the RHEED experiment, an electron beam of 15 keV
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Published 21 Aug 2020

Gram-scale synthesis of splat-shaped Ag–TiO2 nanocomposites for enhanced antimicrobial properties

  • Mohammad Jaber,
  • Asim Mushtaq,
  • Kebiao Zhang,
  • Jindan Wu,
  • Dandan Luo,
  • Zihan Yi,
  • M. Zubair Iqbal and
  • Xiangdong Kong

Beilstein J. Nanotechnol. 2020, 11, 1119–1125, doi:10.3762/bjnano.11.96

Graphical Abstract
  • , antimicrobial and photocatalytic activities [3]. The main challenges of using the nanocomposites in the biomedical and textile-coating fields are to keep the synthesis processes at a low cost and to control for yield and stability issues. Currently, a number of techniques such as electron beam evaporation
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Published 29 Jul 2020

Formation of metal/semiconductor Cu–Si composite nanostructures

  • Natalya V. Yumozhapova,
  • Andrey V. Nomoev,
  • Vyacheslav V. Syzrantsev and
  • Erzhena C. Khartaeva

Beilstein J. Nanotechnol. 2019, 10, 2497–2504, doi:10.3762/bjnano.10.240

Graphical Abstract
  • . Furthermore, the effective cooling rate of the Cu–SiOx core–shell nanoparticles experimentally obtained by the electron beam evaporation method has been estimated. Funding This work was supported by the Russian Scientific Foundation [project number 18-79-10143]. Diagram of the installation for the production
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Published 13 Dec 2019

The importance of design in nanoarchitectonics: multifractality in MACE silicon nanowires

  • Stefania Carapezzi and
  • Anna Cavallini

Beilstein J. Nanotechnol. 2019, 10, 2094–2102, doi:10.3762/bjnano.10.204

Graphical Abstract
  • the cleaned surfaces by electron beam evaporation. These gold films do not coat the substrates uniformly. The uncovered parts of the Si surfaces become the seeds of the NWs in the subsequent etching step. For the etching step, the substrates are immersed in an aqueous solution of HF (5 M) and H2O2
  • Si substrate by electron beam evaporation. The conditions during the growth of the gold thin film were similar to the ones during the growth of the samples SiNW1 and SiNW2. The black regions correspond to the uncovered silicon areas, while the white region represents the deposited Au. It is evident
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Published 31 Oct 2019

Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

  • Petronela Prepelita,
  • Ionel Stavarache,
  • Doina Craciun,
  • Florin Garoi,
  • Catalin Negrila,
  • Beatrice Gabriela Sbarcea and
  • Valentin Craciun

Beilstein J. Nanotechnol. 2019, 10, 1511–1522, doi:10.3762/bjnano.10.149

Graphical Abstract
  • deposited by rfMS, the thermal treatments show superior performance in terms of the optical properties, such as an increase of the bandgap by 0.41 eV. On the other hand, ITO films deposited by electron beam evaporation do not exhibit an improvement of their optical properties even after thermal treatment
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Published 25 Jul 2019

Fabrication of silver nanoisland films by pulsed laser deposition for surface-enhanced Raman spectroscopy

  • Bogusław Budner,
  • Mariusz Kuźma,
  • Barbara Nasiłowska,
  • Bartosz Bartosewicz,
  • Malwina Liszewska and
  • Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2019, 10, 882–893, doi:10.3762/bjnano.10.89

Graphical Abstract
  • physical methods include fabrication of nanostructured silver films by electron-beam evaporation [16], gas aggregation [17] and radio-frequency sputtering [18]. The advantages of certain physical methods over chemical methods include that there is no reagent contamination and that the monodispersity of
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Published 16 Apr 2019

Zn/F-doped tin oxide nanoparticles synthesized by laser pyrolysis: structural and optical properties

  • Florian Dumitrache,
  • Iuliana P. Morjan,
  • Elena Dutu,
  • Ion Morjan,
  • Claudiu Teodor Fleaca,
  • Monica Scarisoreanu,
  • Alina Ilie,
  • Marius Dumitru,
  • Cristian Mihailescu,
  • Adriana Smarandache and
  • Gabriel Prodan

Beilstein J. Nanotechnol. 2019, 10, 9–21, doi:10.3762/bjnano.10.2

Graphical Abstract
  • solutions [13] and iv.) iron by laser pyrolysis [14][15] or by electron beam evaporation [16]. Cobalt-doped tin oxide has also been reported, and the resulting polycrystalline films were prepared by spin-coating and annealing from chloride ethanolic solutions resulted in lower bandgap values than pure SnO2
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Published 02 Jan 2019

Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

  • Nima Khoshsirat,
  • Fawad Ali,
  • Vincent Tiing Tiong,
  • Mojtaba Amjadipour,
  • Hongxia Wang,
  • Mahnaz Shafiei and
  • Nunzio Motta

Beilstein J. Nanotechnol. 2018, 9, 2700–2707, doi:10.3762/bjnano.9.252

Graphical Abstract
  • silver collection grid was deposited on top using electron-beam evaporation. It is worth mentioning that the fabrication of a cell on a single-layer Mo-coated glass also has been tried. However, the Mo films were peeled-off from the substrate during CdS CBD. Thus, herein only the performance of a cell
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Published 18 Oct 2018

Block copolymers for designing nanostructured porous coatings

  • Roberto Nisticò

Beilstein J. Nanotechnol. 2018, 9, 2332–2344, doi:10.3762/bjnano.9.218

Graphical Abstract
  • , where the titanium assembly is driven by the microphase separation of the PS-b-PEO layer underneath [99]. When the titanium coating procedure is performed by electron beam evaporation onto a previously self-assembled PS-b-PEO substrate, Ti preferentially deposits and diffuses inside the PS matrix, thus
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Published 29 Aug 2018

Metal–dielectric hybrid nanoantennas for efficient frequency conversion at the anapole mode

  • Valerio F. Gili,
  • Lavinia Ghirardini,
  • Davide Rocco,
  • Giuseppe Marino,
  • Ivan Favero,
  • Iännis Roland,
  • Giovanni Pellegrini,
  • Lamberto Duò,
  • Marco Finazzi,
  • Luca Carletti,
  • Andrea Locatelli,
  • Aristide Lemaître,
  • Dragomir Neshev,
  • Costantino De Angelis,
  • Giuseppe Leo and
  • Michele Celebrano

Beilstein J. Nanotechnol. 2018, 9, 2306–2314, doi:10.3762/bjnano.9.215

Graphical Abstract
  • electron beam evaporation and lift-off, defines the gold nanorings. Optical setup The nonlinear optical microscope employed in our experiment is depicted in Figure 7. The radiation from a 150 fs-laser centered at 1554 nm is sent to the sample through a high-NA (0.85) air objective, after setting the linear
  • SiOx are deposited on the surface via plasma-enhanced chemical vapor deposition (PECVD) to later improve the adhesion of the negative-tone HSQ resist on the III–V layer. A first positive-tone lithography step with PMMA resist is performed to realize the alignment structures, followed by electron beam
  • evaporation of 5 nm of Ti and 80 nm of Au. Finally, a standard lift-off procedure reveals the gold alignment structures. The choice of gold as a material at this stage is crucial to ensure the highest possible contrast and precision in the successive lithography step. HSQ resist is then spun and nanoantenna
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Published 27 Aug 2018

Optical near-field mapping of plasmonic nanostructures prepared by nanosphere lithography

  • Gitanjali Kolhatkar,
  • Alexandre Merlen,
  • Jiawei Zhang,
  • Chahinez Dab,
  • Gregory Q. Wallace,
  • François Lagugné-Labarthet and
  • Andreas Ruediger

Beilstein J. Nanotechnol. 2018, 9, 1536–1543, doi:10.3762/bjnano.9.144

Graphical Abstract
  • coverslip and distributed homogeneously. After the sample dried, 3 nm of Ti followed by 30 nm of Au were deposited using electron beam evaporation. The sample was then sonicated in ethanol for 1 min to remove the polystyrene particles. A pattern of gold plasmonic nanotriangles (side length ≈350 nm
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Published 23 May 2018

Cathodoluminescence as a probe of the optical properties of resonant apertures in a metallic film

  • Kalpana Singh,
  • Evgeniy Panchenko,
  • Babak Nasr,
  • Amelia Liu,
  • Lukas Wesemann,
  • Timothy J. Davis and
  • Ann Roberts

Beilstein J. Nanotechnol. 2018, 9, 1491–1500, doi:10.3762/bjnano.9.140

Graphical Abstract
  • nominally 100 nm thickness is deposited using electron beam evaporation (Intvac Nanochrome I) onto a high quality borosilicate glass slide with 5 nm of chromium as an adhesive layer. The rate of deposition of the gold was set to 0.3 Å/s. High quality azimuthal arrangements of three slot apertures with
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Published 18 May 2018

Tailoring polarization and magnetization of absorbing terahertz metamaterials using a cut-wire sandwich structure

  • Hadi Teguh Yudistira,
  • Shuo Liu,
  • Tie Jun Cui and
  • Han Zhang

Beilstein J. Nanotechnol. 2018, 9, 1437–1447, doi:10.3762/bjnano.9.136

Graphical Abstract
  • on a silicon wafer and then baked on a hot plate at 80 °C, 120 °C, 180 °C and 250 °C for 5, 5, 5 and 20 min, respectively. Then, standard photolithography was performed [34][35], and another Ti/Au layer (30/100 nm) was deposited onto the PI substrate by electron beam evaporation. A standard lift-off
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Published 16 May 2018

Field-controlled ultrafast magnetization dynamics in two-dimensional nanoscale ferromagnetic antidot arrays

  • Anulekha De,
  • Sucheta Mondal,
  • Sourav Sahoo,
  • Saswati Barman,
  • Yoshichika Otani,
  • Rajib Kumar Mitra and
  • Anjan Barman

Beilstein J. Nanotechnol. 2018, 9, 1123–1134, doi:10.3762/bjnano.9.104

Graphical Abstract
  • previously. Results and Discussion 25 × 25 μm2 arrays of two-dimensional Py antidot arrays with triangular holes arranged in hexagonal lattice symmetry have been fabricated by a combination of electron-beam lithography, electron-beam evaporation and ion milling [20]. Figure 1a,b shows the scanning electron
  • -dimensional arrays of Py antidots with triangular holes arranged in a hexagonal lattice have been fabricated by a combination of electron-beam lithography, electron-beam evaporation and ion milling. The 20 nm-thick Py film was deposited on a commercially available self-oxidized Si(100) substrate and a 60-nm
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Published 09 Apr 2018

Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures

  • Susann Liedtke,
  • Christoph Grüner,
  • Jürgen W. Gerlach and
  • Bernd Rauschenbach

Beilstein J. Nanotechnol. 2018, 9, 954–962, doi:10.3762/bjnano.9.89

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  • Susann Liedtke Christoph Gruner Jurgen W. Gerlach Bernd Rauschenbach Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, D-04318 Leipzig, Germany 10.3762/bjnano.9.89 Abstract Metals with a wide range of melting points are deposited by electron beam evaporation under oblique
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Published 22 Mar 2018

Thin SnOx films for surface plasmon resonance enhanced ellipsometric gas sensing (SPREE)

  • Daniel Fischer,
  • Andreas Hertwig,
  • Uwe Beck,
  • Volkmar Lohse,
  • Detlef Negendank,
  • Martin Kormunda and
  • Norbert Esser

Beilstein J. Nanotechnol. 2017, 8, 522–529, doi:10.3762/bjnano.8.56

Graphical Abstract
  • , several different coating methods were developed which include chemical vapor deposition [11], sol–gel [12], spray pyrolysis [13], sputtering [14][15][16] and electron beam evaporation [17]. In our approach, we aim to develop a new sensing concept which combines the adsorption concept of MOS sensors with
  • of 7 mm (Edmund Optics). The prisms were coated on the hypotenuse face with a 45 nm gold layer by using the electron beam evaporation technique (CS 730 ECS, von Ardenne Anlagentechnik GmbH). The additional undoped SnOx add-on layer was then added by using radio frequency (RF) magnetron sputtering (CS
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Published 28 Feb 2017
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